CONVECTIVE SUBSTRATE COOLING WITH MINIMAL PRESSURE CHANGE
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United States of America Patent
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Issued Date -
Aug 29, 2024
app pub date -
Feb 24, 2023
filing date -
Feb 24, 2023
priority date (Note) -
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status (Latency Note)
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Abstract
Embodiments of the present disclosure generally relate to a reflector plate assembly. The reflector plate assembly includes a reflector plate and a baffle. The reflector plate includes a gas conduit, a plurality of gas passages, a plurality of lift pin holes, and a gas inlet. The gas conduit includes a first opening on a front side of the reflector plate and a second opening on a backside of the reflector plate adjacent to the gas conduit. The baffle is attached at a first end to a support base of an edge ring. The baffle is attached at a second end to the backside of the reflector plate. The baffle forms an opening in the backside of the reflector plate to the gas conduit.
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