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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TOKYO ELECTRON LIMITED	TOKYO 107-6325

International Classification(s)

• H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
• H02M:APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEE....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
ENDO, Hiroki	Miyagi, JP	104	724
FUJIWARA, Naoki	Miyagi, JP	189	1698
ISHIKAWA, Shinya	Miyagi, JP	95	205
MATSUMOTO, Naoki	Miyagi, JP	303	9159
MIHARA, Naoki	Miyagi, JP	20	1188
NAGAMI, Koichi	Miyagi, JP	50	910
NAGASHIMA, Nozomu	Miyagi, JP	15	117
TAMONOKI, Shinya	Miyagi, JP	12	24

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Feb 29, 2028
7.5 Year Payment	$3600.00	$1800.00	$900.00	Feb 29, 2032
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Feb 29, 2036

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2024/0290,577

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

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