OPTICAL PULSE STRETCHER, LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

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United States of America Patent

APP PUB NO 20240291219A1
SERIAL NO

18656729

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Abstract

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An optical pulse stretcher that stretches a pulse width of a pulse laser beam includes a polarizer configured to separate a component in a specific polarization direction of the pulse laser beam that has entered, a delay optical system including a plurality of mirrors through which the pulse laser beam reflected by or transmitted through the polarizer is propagated; and a first Faraday rotator that includes a first magnet and a first Faraday material and is disposed on an optical path of the delay optical system to rotate a polarization direction of the pulse laser beam.

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Patent Owner(s)

Patent OwnerAddress
GIGAPHOTON INC400 OAZA YOKOKURASHINDEN OYAMA-SHI TOCHIGI 323-8558

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
MIURA, Taisuke Oyama-shi, JP 20 70
TAMARU, Yuki Oyama-shi, JP 7 2
YASUHARA, Ryo Toki-shi, JP 8 5

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