TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS
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United States of America Patent
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Issued Date -
Aug 29, 2024
app pub date -
May 6, 2024
filing date -
Jun 15, 2018
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Abstract
There is disclosed acoustic resonators and filter devices. An acoustic resonator includes a single-crystal piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm.
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