SENSOR AND CAPACITOR DEVICE
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United States of America Patent
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Issued Date -
Sep 12, 2024
app pub date -
Jul 13, 2023
filing date -
Mar 7, 2023
priority date (Note) -
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status (Latency Note)
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Abstract
According to one embodiment, a sensor includes a base including a first base region and a second base region, and an element section. The element section includes a fixed electrode fixed to the second base region, a first fixed member fixed to the first base region, a first intermediate member supported by the first fixed member, a first connecting member supported by the first intermediate member, a movable portion, and a first support member. The first connecting member includes a first connecting portion, a second connecting portion, and a third connecting portion. The movable portion is connected to the second connecting portion. The movable portion includes a movable electrode. A first gap is provided between the fixed electrode and the movable portion. The first support member is fixed to the base. The first support member supports the third connecting portion.
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