SEMICONDUCTOR POST-PROCESS IMPACT DETECTION DEVICE, SEMICONDUCTOR POST-PROCESS TRANSPORTATION SYSTEM INCLUDING SAME, AND IMPACT LOCATION TRACKING METHOD USING SAME
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United States of America Patent
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Issued Date -
Sep 12, 2024
app pub date -
Sep 14, 2023
filing date -
Mar 10, 2023
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Abstract
A semiconductor post-process impact detection device includes a detection body that moves along a distribution line. A vibration detection unit is coupled to the detection body. The vibration detection unit detects vibration of the detection body. A rotation detection unit is coupled to the detection body. The rotation detection unit detects rotation of the detection body. An internal power supply is coupled to the detection body. A controller processes signals of the vibration detection unit and the rotation detection unit to determine information concerning the detection body. The controller transmits the information concerning the detection body to a data transmission unit. The data transmission unit transmits the information concerning the detection body provided from the controller to a data display unit. The data display unit displays the information concerning the detection body provided from the data transmission unit.
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