WATER REFINING APPARATUS AND METHOD OF MANUFACTURING WAFER
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United States of America Patent
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Issued Date -
Sep 19, 2024
app pub date -
Mar 14, 2024
filing date -
Mar 15, 2023
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Abstract
A water refining apparatus for refining water flowing therein includes a filter for filtering the water to remove solid particles therefrom, a sterilizing unit disposed downstream of the filter and for irradiating the water with ultraviolet rays to sterilize the water, an ion exchange filter disposed downstream of the sterilizing unit and for performing an ion exchange on impurity ions contained in the water to remove impurities from the water, a deaerating unit for deaerating the water, and a measuring unit disposed downstream of the deaerating unit and for measuring a dissolved oxygen concentration in the water.
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