METHOD FOR PRODUCING COMPOSITE SUBSTRATE

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United States of America Patent

APP PUB NO 20240322777A1
SERIAL NO

18736691

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Abstract

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A method of producing a composite substrate includes: forming a first layer on a lower surface side of a piezoelectric substrate having an upper surface and a lower surface facing each other and having an electrode formed on the lower surface; performing flattening treatment to set a waviness of a surface of the first layer to more than 2 nm and 70 nm or less; and joining a support substrate to a first layer side of the piezoelectric substrate having the first layer formed thereon.

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Patent Owner(s)

Patent OwnerAddress
NGK INSULATORS LTDNAGOYA CITY AICHI PREF 467-8530

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
IIDA, Tsuyoshi Fujiyoshida-Shi, JP 2 7
YAMADERA, Takahiro Nagoya-Shi, JP 21 56

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