MULTIWIRE ELECTRIC DISCHARGE MACHINE, MULTIWIRE ELECTRIC DISCHARGE MACHINING METHOD, AND SEMICONDUCTOR WAFER MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Oct 3, 2024
app pub date -
Mar 24, 2022
filing date -
Mar 24, 2022
priority date (Note) -
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Abstract
A multiwire electric discharge machine includes: a plurality of guide rollers; a machining power supply that applies a voltage between each of a plurality of cutting wire sections and a workpiece; a dummy workpiece including a contact surface curved in such a way as to be capable of coming into contact with a curved surface of the workpiece except for an end point, the end point being to be reached by each of the plurality of cutting wire sections when machining of the workpiece is completed, the dummy workpiece supporting the workpiece from one side in a first direction, the first direction being a direction in which the workpiece moves; and a pressing mechanism including a pressing portion, the pressing mechanism pressing the workpiece against the dummy workpiece by bringing the pressing portion into contact with the workpiece from another side in the first direction.
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