COMPACT ADJUSTABLE SPRAY NOZZLE TO PRECISELY TARGET AREAS FOR RINSING, REMOVING PARTICLES, AND IMPROVE HARDWARE CLEANLINESS
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United States of America Patent
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Issued Date -
Oct 3, 2024
app pub date -
Mar 30, 2023
filing date -
Mar 30, 2023
priority date (Note) -
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Abstract
Embodiments of the present disclosure generally relate fluid nozzles used in semiconductor manufacturing. The fluid nozzle includes a nozzle body disposed between an inlet face and an outlet face. The body includes a threaded region, a central symmetric axis, and a port. The threaded region is disposed between the inlet face and the outlet face. The central symmetric axis extends along a port axis and through the nozzle body. The port extends along a port axis and through the nozzle body. The port axis extends through the nozzle body between the inlet face and the outlet face. A first angle is formed between the port axis and the central symmetric axis. A port outlet face is perpendicular to the port axis, adjacent to the outlet face, and at a second angle to the outlet face.
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