PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR MANUFACTURING CURED RELIEF PATTERN, AND SEMICONDUCTOR APPARATUS

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United States of America Patent

APP PUB NO 20240329525A1
SERIAL NO

18742227

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A photosensitive resin composition containing a resin and a compound each having a structure specified by the present specification provides a cured film having excellent adhesiveness to copper wiring.

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Patent Owner(s)

Patent OwnerAddress
ASAHI KASEI KABUSHIKI KAISHATOKYO 100-0006

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
IDO, Yoshito Tokyo, JP 7 8
INOUE, Taihei Tokyo, JP 9 9
NAKAMURA, Mitsutaka Tokyo, JP 45 334
SASAKI, Takahiro Tokyo, JP 257 2945
SASANO, Daisuke Tokyo, JP 4 6
YORISUE, Tomohiro Tokyo, JP 14 42
YUNOKUCHI, Tomoshige Tokyo, JP 5 6

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