Importance

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Abstract

The film forming apparatus is a device that forms a metal film on the surface of a base material. The film forming apparatus includes a container containing a plating solution, an electrolyte film that covers an opening of the container formed at a position facing the base material, and a positive electrode disposed above the electrolyte film in the container. It includes a power source that applies a voltage between the positive electrode and the base material. On the surface of the positive electrode, a surface facing the electrolyte film has a plurality of curved surfaces arranged in a convex manner toward the electrolyte film. A through hole passing through the positive electrode is formed between the plurality of curved surfaces.

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First Claim