MEMS Multiple Degree of Freedom Piezoelectric Actuator
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United States of America Patent
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Issued Date -
Oct 17, 2024
app pub date -
Dec 21, 2023
filing date -
Dec 21, 2023
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Abstract
A MEMS imaging actuator assembly includes: a first structural assembly; a second structural assembly; and a tip-tilt displacement assembly, configured to position the first structural assembly with respect to the second structural assembly, including: one or more multi-morphic thin film actuator assemblies, and one or more motion control assemblies; wherein one of the structural assemblies is configured to mount an optical device.
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