Importance

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Abstract

An infrared processing device includes an infrared heater including a heating body and a metamaterial structure capable of, when thermal energy is input from the heating body, radiating infrared rays which have a maximum peak of a non-Planck distribution and whose maximum peak has a peak wavelength of 2 μm or more and 7 μm or less; an inner tube that surrounds the infrared heater, contains at least one of a fluorine-based material having a C—F bond and calcium fluoride, and transmits infrared rays of the peak wavelength; and an outer tube that surrounds the inner tube and forms, between the inner tube and the outer tube, an object channel through which a processing object is allowed to flow.

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First Claim