Importance

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Abstract

A control unit supplies a discharge liquid used in a second half of washing process by a washing process unit to a washing process unit, and supplies the discharge liquid used in a second half of the washing process by the washing process unit to the washing process unit. Since the discharge liquid used in the washing process unit is reused in the washing process unit and the discharge liquid used in the washing process unit is reused in the washing process unit, a supply amount of pure water from a supply pipe to the washing process unit and the washing process unit can be reduced. Therefore, by recycling the pure water, a consumption amount of the pure water in the washing process can be reduced.

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First Claim