Importance

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Abstract

The system includes a processor configured to energize a pair of torque coils with a force signal to generate a magnetic force between the pair of torque coils and an internal magnet of a control arm disposed between the pair of torque coils. The control arm is connected to a probe arm, and the magnetic force causes the control arm and the probe arm to rotate about a pivot joint and causes a probe tip of the probe arm to contact a surface of a sample. After energizing the sensing subsystem with an excitation signal, the processor receives a sensing signal difference from the sensing subsystem that is proportional to the rotational position of the control arm, which corresponds to a height of the probe tip relative to the surface of the sample.

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First Claim