METHOD AND APPARATUS FOR REAL TIME OPTIMIZATION OF A MICROWAVE PLASMA

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United States of America Patent

APP PUB NO 20240357727A1
SERIAL NO

18687239

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of real time optimization of a microwave plasma includes adjusting in real time an injection angle of a swirl gas flow of the microwave plasma, the magnitude of the swirl gas flow of the microwave plasma, or the microwave power applied to the microwave plasma.

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Patent OwnerAddress
6K INC25 COMMERCE WAY NORTH ANDOVER MA 01845 01845

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KOZLOWSKI, Michael Reading, US 20 182
SHANG, Zongren Westborough, US 11 25

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