IONIC LIQUID AND METHOD FOR PRODUCING THE SAME

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United States of America

APP PUB NO 20240360349A1
SERIAL NO

18681652

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Abstract

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Provided is an ionic liquid that can be used for semiconductor manufacturing and that has a low metal ion content. This ionic liquid comprises cations and onions and contains, each by not more than 100 ppb, metal ions of 16 elements indicated by the following element symbols: Li, Na, Ca, Mg, Al, K, Ti, Cr, Mu, Fe, Co, Ni, Cu, Zn, Ba, and W.

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Patent Owner(s)

Patent OwnerAddress
NISSHINBO HOLDINGS INCTOKYO 103-8650

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Masuda, Gen Chiba-city, JP 47 359
Ochikubo, Tatsuya Chiba-city, JP 1 0

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