SUBSTRATE CLEANING IMPROVEMENT
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Oct 31, 2024
app pub date -
Apr 28, 2023
filing date -
Apr 28, 2023
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A substrate cleaning apparatus is provided including: a shaft having an outer body and an interior volume, the shaft having a length in a first direction; and a pad carrier assembly comprising: a housing connected to the outer body in a fixed position relative to the outer body of the shaft, the housing having an inner volume; a piston disposed in the inner volume of the housing, the piston movable in the first direction based on pressure changes in the inner volume of the shaft; a pad carrier; and a flexible member connected between the housing and the pad carrier, the flexible member configured to extend or retract in the first direction with the pad carrier based on the pressure changes in the interior volume of the shaft.
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