FEEDER MEMBER AND WAFER PLACEMENT TABLE
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United States of America
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Issued Date -
Oct 31, 2024
app pub date -
Nov 20, 2023
filing date -
Nov 20, 2023
priority date (Note) -
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Abstract
A feeder member is used to supply electricity to an electrode embedded in a ceramic base. The feeder member includes an electrode-side terminal that is made of a high-melting-point metal containing material and joined to the electrode, an intermediate member that is made of a Cu containing material and directly joined to the electrode-side terminal without using a brazing material, a cable support member that is made of a Cu containing material and joined to the intermediate member, and a cable that is made of a Cu containing material and that has one end whose end surface is welded to the cable support member.
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