PLATEN ROTATION DEVICE
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United States of America
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Issued Date -
Nov 7, 2024
app pub date -
Jul 12, 2024
filing date -
Jul 12, 2024
priority date (Note) -
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Abstract
A method includes controlling a rotational kinetic energy of a rotor assembly of a wafer-platen, wherein a rotational velocity of the wafer-platen is either increased or decreased. The method further includes generating an electrical energy output of the wafer-platen based on decreased rotational kinetic energy of the wafer-platen. The method further includes storing the electrical energy output by the rotator assembly based on the decreased rotational kinetic energy of the wafer-platen.
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