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Abstract

A micromachining system includes a laser generator, an acousto-optical deflector (AOD), and at least one signal generator. The laser generator is configured to generate a laser beam, and the at least one AOD is positioned in a path of the laser beam. The at least one acoustic signal generator is configured to generate at least two acoustic signals, including a first acoustic signal having a periodic waveform and a second acoustic signal having a freeform waveform. The at least one acoustic signal generator is further configured to apply the first acoustic signal to the AOD to output a deflected laser beam having a Gaussian profile, and apply the second acoustic signal to the AOD to adjust the Gaussian profile of the deflected laser beam to a modified profile.

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