Small-Angle X-Ray Scatterometry
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United States of America
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Nov 14, 2024
app pub date -
Jul 25, 2024
filing date -
Jul 25, 2024
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Abstract
An x-ray apparatus includes a mount that is configured to hold a sample and an x-ray source that is configured to direct an x-ray beam toward a first side of the sample. A small angle x-ray scattering (SAXS) detector is positioned downstream to a second side of the sample, and configured to detect at least a part of a SAXS pattern formed by x-rays that have been transmitted through the sample and exited through the second side. An x-ray fluorescence (XRF) detector is configured to detect fluorescent x-rays emitted from the sample, wherein the XRF detector comprises an aperture.
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