Importance

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Abstract

A method of imaging an object in a first material having a different charge density to the object is provided, the method comprising: focusing a charged particle beam to a virtual charged particle beam source in the first material; moving the virtual charged particle beam source in and around the object to provide at least one charged particle reflected object beam or at least one charged particle refracted object beam and at least one charged particle bypass beam, wherein the charged particle reflected object beam or the charged particle refracted object beam and the charged particle bypass beam intercept one another to form an interference zone; and defocusing the interference zone to provide a Fresnel fringe, the Fresnel fringe forming an image of the object; or focusing the virtual charged particle beam source on the object to provide a first lower energy charged particle beam and a second lower energy charged particle beam, wherein the first lower energy charged particle beam and the second lower energy charged particle beam intercept one another to form a self-interference zone; defocusing the self-interference zone to provide a Fresnel fringe, the Fresnel fringe forming an image of the object.

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First Claim