Importance

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Abstract

Provided herein are heating systems for ultra-pure deionized water. One heating system is a closed loop, dual input recirculating system that includes a tank and a trim heater. The tank accepts a flow of water from a cold water source and a flow of water from a heated water source. The system combines the cold and heated water to achieve a first temperature within the tank. The water is then heated from the first temperature to a second final temperature with the trim heater. The water, at the second, final temperature, is sent through a closed loop recirculating system for the use in a manufacturing process such as semiconductor manufacturing.

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First Claim