ACOUSTIC FOREIGN MATTER REMOVAL DEVICE
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Nov 28, 2024
app pub date -
Aug 26, 2021
filing date -
Aug 26, 2021
priority date (Note) -
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Abstract
An acoustic foreign matter removal device includes a stage, an acoustic head, and a movement mechanism. The acoustic head has a plurality of ultrasonic speakers and a casing22. A plurality of ultrasonic waves generated from the plurality of ultrasonic speakers are concentrated in a gap between the casing and a holding surface of the stage to form a low pressure region; and foreign matter adhering to a surface of an electronic component is sucked into the low pressure region to remove the foreign matter from the surface.
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