LIQUID-SEALED PUMP OPERATING METHOD, MEMBRANE DEGASIFIER, PURE WATER PRODUCTION SYSTEM, AND PURE WATER PRODUCTION METHOD

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20240399271A1
SERIAL NO

18698027

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Abstract

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A liquid-sealed vacuum pump operating method includes: discharging a liquid from a vacuum pipe connected to a liquid-sealed vacuum pump; supplying a sealing liquid under pressure to the liquid-sealed vacuum pump such that the liquid-sealed vacuum pump contains a predetermined amount of the sealing liquid, and driving the liquid-sealed vacuum pump until a pressure in the vacuum pipe is reduced to a predetermined pressure; and stopping supply of the pressurized sealing liquid to the liquid-sealed vacuum pump in a case in which the pressure in the vacuum pipe is reduced to the predetermined pressure, and circulating the sealing liquid in a circulation flow path from the liquid-sealed vacuum pump to maintain a state in which the predetermined amount of the sealing liquid is present in the liquid-sealed vacuum pump.

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Patent Owner(s)

Patent OwnerAddress
NOMURA MICRO SCIENCE CO LTD2-9-10 OKATA ATSUGI-SHI KANAGAWA 2430021

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KITO, Takatsugu Atsugi-shi, Kanagawa, JP 2 0
SATO, Shinsuke Atsugi-shi, Kanagawa, JP 63 1445
TORIMURA, Shuhei Atsugi-shi, Kanagawa, JP 2 0
YAMAMOTO, Katsumi Atsugi-shi, Kanagawa, JP 79 695

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