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Abstract

Systems and methods for fabricating quantum hardware for use in a quantum computing system are provided. In one example, the system includes at least one metrology chamber operable to receive a workpiece. The workpiece includes a quantum structure associated with the quantum hardware. The metrology chamber includes at least one detector operable to characterize an atomic scale parameter associated with a surface of the quantum structure. The system includes at least one process chamber operable to receive the workpiece. The at least one process chamber is operable to perform a fabrication process on the quantum structure based at least in part on the atomic scale parameter. The system includes a transfer apparatus operable to transfer the workpiece between the at least one metrology chamber and the at least one process chamber without exposure to ambient.

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First Claim