METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20240417242A1
SERIAL NO

18820419

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Abstract

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A method of fabricating a microelectromechanical systems (MEMS) array includes forming a plurality of mirror structures on a first side of a substrate. The plurality of mirror structures includes a plurality of first mirror structures having a first resonant frequency and a plurality of second mirror structures having a second resonant frequency different from the first resonant frequency.

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Patent Owner(s)

Patent OwnerAddress
CALIENT AI INC160 CREMONA DRIVE SUITE 160 GOLETA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
MILLER, Scott A Ithaca, US 111 1536

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