Importance

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Abstract

Provided are an air nozzle and a coater. The air nozzle includes an air outlet chamber, an air return chamber, and an infrared light assembly, where the air outlet chamber includes an air outlet panel, the air outlet panel facing a substrate to be treated; the air return chamber is provided with an air return panel on a side facing the substrate, the air return panel being provided with a plurality of punch holes for communication with the air return chamber; the air outlet panel is configured to convey a medium inside the air outlet chamber to outside the air nozzle, and the medium enters the air return chamber through the air return panel after passing through the substrate; and the infrared light assembly is provided on a path of the medium entering the air return chamber.

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First Claim