WAFER CARRIER DRY CLEANER
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Dec 26, 2024
app pub date -
Sep 9, 2024
filing date -
Sep 9, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
A wafer carrier dry cleaner includes a receiver, a tool and a movable nozzle. The receiver includes a clean room. The clean room includes a port used to load a wafer carrier. The wafer carrier comprises a box and a door closing an opening of the box. The tool is located in the clean room and configured to separate the door from the box. The movable nozzle is located in the clean room. The movable nozzle is configured to purge clean gas towards the box and the door at a first position between the box and the door when the box and the door are separated.
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