SUBSTRATE PROCESSING SYSTEM AND DECOMPRESSION STRUCTURE
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United States of America
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Issued Date -
Jan 9, 2025
app pub date -
Jun 28, 2024
filing date -
Jun 28, 2024
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Abstract
A substrate processing system capable of supplying a gas-dissolved liquid having a supersaturated amount of dissolved gas without generating large bubbles in a middle of a supply line is disclosed. The substrate processing system includes a control device configured to control an operation of a bubble generation device. The control device is configured to control at least one of a pressure regulator and a boost pump so that a pressure of a gas supplied to a gas-dissolved liquid generation device is smaller than a pressure of a liquid supplied to the gas-dissolved liquid generation device.
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