Importance

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Abstract

A charged particle beam deflection device includes a layered structure including a plurality of layers and having a hollow shape through which a charged particle beam passes, a first coil configured to deflect the charged particle beam in a first direction different from a travel direction of the charged particle beam, a second coil configured to deflect the charged particle beam in a second direction, and a pressing portion located on an outer peripheral surface of the layered structure and configured to press the outer peripheral surface from the exterior toward the interior. The plurality of layers includes a first coil support layer configured to support the first coil and a second coil support layer configured to support the second coil. The layered structure includes a gap, through which a cooling solvent can flow, between two adjacent layers among the plurality of layers.

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First Claim