ALL-IN-ONE WAFER CLEANING MACHINE FOR MONOCRYSTALLINE SILICON PRODUCTION
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United States of America
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Issued Date -
Jan 16, 2025
app pub date -
Jul 18, 2023
filing date -
Jul 18, 2023
priority date (Note) -
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Abstract
An all-in-one wafer cleaning machine for monocrystalline silicon production includes: a circulation track disposed at a rear end of a cleaning equipment main body and fixed to the cleaning equipment main body; a horizontal moving device disposed at an outer side of the circulation track; a first motor fixedly installed at one end inside the horizontal moving device; a first transmission gear disposed at an output end of the first motor; a first fixed rod fixedly disposed at the other end of the horizontal moving device; a first fixed gear disposed at one end of the first fixed rod, wherein the first transmission gear and the first fixed gear are engaged with the circulating track; and a vertical track fixedly disposed at the horizontal moving device.
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