Importance

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Abstract

A substrate transport system includes a transport section that defines a range within which a substrate is transported, a first placement portion and a second placement portion on which the substrate is placed, and a transfer robot that is provided inside the transport section and transports the substrate from the first placement portion to the second placement portion, wherein the transfer robot includes a main body unit disposed within the transport section, a turning support unit that is connected to the main body unit, an arm support unit that is connected to the turning support unit, an arm unit that is connected to the arm support unit, and a holding unit that connected to the arm unit, wherein the turning support unit includes a first end portion that is rotatably connected to the main body unit, and a second end portion to which the arm support unit is rotatably connected.

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First Claim