Importance

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Abstract

A substrate transport system includes a transport section a first placement portion and a second placement portion, and a transfer robot, wherein the transfer robot includes a main body unit disposed inside a transfer section, a turning support unit connected to the main body unit, an arm support unit connected to the turning support unit, an arm unit connected to the arm support unit, and a holding unit connected to the arm unit, wherein the arm unit includes a first arm that is supported by the arm support unit and a second arm that supports the holding unit and is supported by the first arm, wherein the turning support unit rotates using a connection portion with the main body unit as a rotation shaft in a plan view, the arm support unit rotates using a connection portion with the turning support unit as a rotation shaft in a plan view.

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First Claim