SUBSTRATE PROCESSING APPARATUS INCLUDING SHOWERHEAD ASSEMBLY
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United States of America Patent
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Issued Date -
Jan 23, 2025
app pub date -
Apr 19, 2024
filing date -
Apr 19, 2024
priority date (Note) -
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Abstract
Proposed is a substrate processing apparatus including a showerhead assembly. A showerhead assembly according to an embodiment includes an upper plate, a gas distribution plate disposed under the upper plate and having a plurality of through-holes, a shower plate disposed under the gas distribution plate and having a plurality of gas spray holes connected to the through-holes, and a fastening unit fastening the gas distribution plate and the shower plate to each other. The fastening unit includes a cam received in the shower plate, and a pinion received in the gas distribution plate. The pinion is coupled to the cam by a rack inserted through a passage formed in the gas distribution plate.
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