Importance

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Abstract

A fluid device has at least one valve unit and at least one recirculation unit, each having a fluid chamber, which channels are fluidically connected to one another via at least one connection channel. The at least one feed channel discharges into the fluid chamber of the valve unit and a discharge channel discharges into the fluid chamber of the recirculation unit. Each of the fluid chambers is delimited by an elastically deformable diaphragm, and the valve unit and the recirculation unit each contain an actuation unit through which the associated valve diaphragm or recirculation diaphragm can be adjusted within the meaning of a change in volume of the associated fluid chamber. A fluidic connection can be established between the feed channel and the connection channel by the valve diaphragm and that a continuous fluidic connection exists between the connection channel and the discharge channel via the fluid chamber.

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First Claim