CMP POLISHING PAD

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United States of America Patent

APP PUB NO 20250025983A1
SERIAL NO

18909604

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A polishing pad has a polishing layer comprising a polymer matrix comprising the reaction product of an isocyanate terminated urethane prepolymer and a chlorine-free aromatic polyamine cure agent and chlorine-free microelements. The microelements can be expanded, hollow microelements. The microelements can have a specific gravity measured of 0.01 to 0.2. The microelements can have a volume averaged particle size of 1 to 120 or 15 to 30 micrometers. The polishing layer is chlorine free.

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Patent Owner(s)

Patent OwnerAddress
DUPONT ELECTRONIC MAT HOLDING INCNot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alden, Donna M Bear, US 11 29
Chiou, Nan-Rong Wilmington, US 28 55
Cimoch, Matthew Newark, US 3 0
Qian, Bainian Newark, US 54 363
Tseng, Sheng-Huan Zhubei, TW 6 0

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