APPARATUS AND METHOD OF CLEANING COMPONENT
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United States of America
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Issued Date -
Jan 30, 2025
app pub date -
Jun 28, 2024
filing date -
Jun 28, 2024
priority date (Note) -
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Abstract
Disclosed is an apparatus for cleaning a component, the apparatus including: a cleaning fluid supply source; a supply line for receiving cleaning fluid from the cleaning fluid supply source and connected with a first port of the component; a discharge line connected with a second port of the component; and a circulation line branched from the discharge line and connected with a third port of the component.
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