Importance

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Abstract

Ultrapure water from a subsystem 4 is fed to a use point 14, via a first heat exchanger 6, a second heat exchanger 10, and a UF membrane separation device 12. The ultrapure water returned from the use point 14 is introduced into a storage tank 16 through a pipe 7. In response to fluctuation of the flowrate of the returned ultrapure water, heated primary pure water is introduced into the storage tank 16 through a pipe 22, and warm water at a prescribed temperature is stored in the storage tank 16 so as to attain a prescribed water level. The warm water in the storage tank 16 is supplied at a fixed flowrate through a heat source fluid path of the first heat exchanger 6.

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First Claim