Importance

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Abstract

The present disclosure provides a method for preparing cerium oxide nanocomposites, comprising, a first step: contacting an anionic surface modifier with a water dispersion of cerium oxide nanoparticles to obtain cerium oxide nanocomposites with negatively charged surfaces, wherein the anionic surface modifier is selected from inorganic polyacids and derivatives thereof, and anionic organic polymers; Second step: contacting a cationic surface modifier with the negatively charged cerium oxide nanocomposites obtained in the first step to obtain cerium oxide nanocomposites with positively charged surfaces, wherein the cationic surface modifier is selected from inorganic Lewis acids and derivatives thereof, and cationic organic polymers. The present disclosure achieves the modulation of the chemical mechanical polishing performance of nanoscale cerium oxide through surface modification, addressing the issue of low polishing rate and inefficient planarization associated with negatively charged cerium oxide particles on silicon oxide.

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First Claim