Importance

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Abstract

An ultrasonic transducer having a rigid supporting plate having first and second surfaces on one side and the other side in a thickness direction; a plurality of cavity portions opened to the first surface; a plurality of waveguides having first end portions on one side that are opened to bottom surfaces of the cavity portions and second end portions on the other side that are opened to the second surface; a flexible resin film fixed to the first surface of the supporting plate to cover the cavity portions; the cavity portions fixed to the flexible film resin film overlapped by piezoelectric elements in their center regions and overlapped by the first surface of the supporting plate in a plan view in their peripheral regions; and an air passage capable of introducing outside air into a plurality of sound passages formed by the pluralities of cavity portions and waveguides.

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First Claim