OZONE WATER SUPPLYING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Feb 6, 2025
app pub date -
Aug 1, 2024
filing date -
Aug 1, 2024
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Abstract
Disclosed is an ozone water supplying unit capable of maintaining a stable ozone concentration of ozone water supplied to a substrate, and a substrate treating apparatus including the same. The substrate treating apparatus includes: a chamber for liquid-treating a substrate loaded into a treating space with a liquid containing ozone water; and an ozone water supplying unit for supplying ozone water to the treating space, in which the ozone water supplying unit includes: an ozone water generator for generating ozone water; an ozone water supply line for supplying ozone water generated by the ozone water generator to the treating space; and a cooler provided in the ozone water supply line to cool the ozone water flowing through the ozone water supply line.
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