MICROMECHANICAL ARM ARRAY WITH MICRO-SPRING STRUCTURES IN MICRO-ELECTROMECHANICAL SYSTEM (MEMS) ACTUATORS
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United States of America
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Issued Date -
Feb 6, 2025
app pub date -
Jul 31, 2023
filing date -
Jul 31, 2023
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Abstract
MEMS actuators having micro spring structures and methods of fabricating the same are provided. An example MEMS actuator includes a first micromechanical arm array including multiple first micromechanical arms spaced from each other in a first horizontal direction and a second micromechanical arm array including multiple second micromechanical arms spaced from each other in the first horizontal direction. The first and the second micromechanical arm arrays are interposed in the first horizontal direction. The MEMS actuator further includes a metal connection structure connected to each first micromechanical arm, and a vertical micro spring structure disposed between the metal connection structure and one of the second micromechanical arms. The vertical micro spring structure includes an upper portion connected to the metal connection structure and a lower portion connected to a top end of the second micromechanical arm.
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