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Abstract

A measurement system includes: n measurement paths that output measurement data of one or more measurement objects, where n is an integer of four or greater; m reference signal generation circuits that output reference signals to be referenced by the n measurement paths, each of the m reference signal generation circuits outputting the reference signal to two or more measurement paths among the n measurement paths, where m is an integer of two or greater; k path anomaly detection circuits that detect/confirm presence or absence of anomalies by comparing the measurement data output from two measurement paths among the n measurement paths, where k is an integer of two or greater; and a processing circuit that receives the measurement data output from the n measurement paths and outputs from the k path anomaly detection circuits as its inputs.

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