MAGNET ASSEMBLY, DEPOSITION DEVICE INCLUDING MAGNET ASSEMBLY, AND DEPOSITION METHOD USING DEPOSITION DEVICE
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United States of America
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Issued Date -
Feb 13, 2025
app pub date -
May 16, 2024
filing date -
May 16, 2024
priority date (Note) -
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Abstract
A magnet assembly includes a yoke plate disposed on a plane, and a magnetic field generator which is disposed on the yoke plate and includes magnet parts including magnet units, magnetic bodies, and non-magnetic bodies. The magnetic bodies overlap the magnet parts in a plan view. The non-magnetic bodies overlap an area between the magnet units in a plan view. The magnet assembly operates in one of a first mode and a second mode. The magnetic field generator generates a magnetic field below the magnetic bodies and the non-magnetic bodies in the first mode and does not substantially generate the magnetic field below the magnetic bodies and the non-magnetic bodies in the second mode.
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