CMP CONDITIONING DISC AND METHOD OF MANUFACTURING THE CMP CONDITIONING DISC
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United States of America
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Feb 20, 2025
app pub date -
Aug 15, 2024
filing date -
Aug 15, 2024
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Abstract
A method of manufacturing a CMP conditioning disc, includes: a primary forming layer forming step of forming a primary forming layer on an outer surface of a shank base and arranging a plurality of diamonds on the primary forming layer; and a secondary forming layer forming step of forming a secondary forming layer on an upper surface of the primary forming layer and exposing at least a portion of the diamonds in the secondary forming layer.
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