SUBSTRATE POSITIONING FOR DEPOSITION MACHINE

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250058572A1
SERIAL NO

18939899

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A deposition device is described. The deposition device has a substrate support and a laser imaging system disposed to image a portion of a substrate positioned on the substrate support. The laser imaging system comprises a laser source and an imaging unit, and is coupled to a deposition assembly disposed across the substrate support.

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Patent Owner(s)

  • KATEEVA, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Audet, Matt Campbell, US 5 1
Baca, Stephen Livermore, US 3 1
Chang, Jerry Cupertino, US 24 232
Darrow, David C Pleasanton, US 8 81
Lu, Jesse Milpitas, US 40 76
Mashevsky, Vadim Palo Alto, US 3 1
Mathia, Karl Menlo Park, US 17 114

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