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Abstract

The invention is notably directed to an optical sensing device (1, 1a). The device has a layer structure comprising a substrate (10), a dielectric layer (11), and opposite antenna elements (17). The substrate is structured to laterally delimit a cavity. The dielectric layer extends on top of the substrate and forms a membrane spanning the cavity. The membrane including n apertures (i.e., nanopores) to the cavity, where n≥1. Two or more apertures (30) are preferably provided (n≥2). More preferably, the number of apertures is larger than or equal to 100 or, even, 400. There are n pairs of opposite antenna elements, which are patterned on top of the dielectric layer, on opposite lateral sides of respective ones of the n apertures. The n pairs of opposite antenna elements define n respective gaps extending between opposite antenna elements of the n pairs along respective directions parallel to a main plane of the substrate. The n pairs of opposite antenna elements define, together with the respective apertures, n molecular passages. Each passage extends from the cavity through a respective one of the n apertures (i.e., through the membrane) and a respective one of the n gaps, along a direction transverse to the main plane of the substrate. The average length of the n gaps along said respective directions is between 4 nm and 20 nm. The n gaps define respective electromagnetic field enhancement regions, in which electromagnetic radiation can be concentrated upon irradiating the antenna elements, for optically sensing molecules, in operation. Moreover, the average diameter of the n apertures is larger than or equal to the average length of the gaps along their respective directions. Thus, the minimal cross-sectional dimension of each of the n passages is limited by a respective one of the n gaps along said respective directions. The invention is further directed to related apparatuses, sensing methods, and fabrication methods.

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First Claim